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Gas Delivery System (GDS)

Taiwan Puritic Corp. has passed OHSAS18000 accreditation in 2006, and passed ISO 9001 upgrading accreditation in 2008, meanwhile, our gas cabinet has passed the related requirements of SEMI S2 accreditation. Taiwan Puritic Corp. can provide equipments related to gas supply system, and its product line includes VMB, VMP, VDB, VDP, Gas Cabinet, Gas Rack, Purifier Box and Scrubber. Moreover, all the above products can be customized according to customer’s need, meanwhile, we can also provide related gas characteristic consultation according to different gas characteristic and the most efficient Total Solution.

台積電
三福氣體

Valve Manifold Box (VMB)

          Date of Publication:2012/10/17  
 
Contact Person:   Steven Huang/ Bryant Hsieh
Contact Phone:   +886-937-349-297
+886-978-103-322

VALVE MANIFOLD BOX / VMB: it is a box connected to the piping gas cabinet or large-flow special gas distribution panel.  The gases are distributed to the equipment of need after pressure and flow regulation.  The box is provided with safety features like gas extraction, nitrogen purge and venting. 

     VMB is a device that distributes special gases safely and stably to semiconductor production equipment.  The gas in the box is always kept at a negative pressure for venting.  In a rare event of gas leak at the gas panel in the box, the gas will be contained due to the safe venting, thus preventing inhalation or even fire (except for inert gas). VMB is installed inside the clean room to divert the gases required for semiconductor production supplied from gas cabinet or large-flow gas diversion box and distribute to processing machines.  In addition, VMB is provided with a purgeline

 

   Related Hot Products:
Valve Manifold Panel (VMP) Bulk Special Gas System (BSGS)
Gas Rack (GR) Scrubber

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